Parts Cleaning Service


HJT’s Cleaning Technology can support to Semiconductor, Display, AMOLED and LED coating parts with good quality control, which are remove surface contamination and prevent substrate damage through the optimum process.

  • Process : Dry Etch, CVD, PVD, DIFF, Photo……
  • Equipment : AMAT, LAM, TEL, Hitach, AMEC……
  • Material : (Al2O3, Y2O3, AlN) Ceramic, Silicon, Quartz, SiC, Coating Parts, Anodized Al, Metal (Al, Ti, Ni, …)……
  • Special Parts : ESC, AlN Ceramic Heater, Shower Head (ceramic bonding on Al body)


Cleaning Products - Dry Etch

PVDCVDLAMTELAMAT

Lid Plate


Shower Head


TCP Window


Depo. Shield


LID


Water Box


Ceramic Heater


TCP Window


Exhaust Plate


Shower Head


Manifold



GDP


CEL Plate


Upper Linear


Dual Manifold



ESC


ESC


ESC


Cleaning Effect

  • Remove particle inner hole through effective cleaning.


  • Remove polyimide on the surface.
  • No change the coating thickness.
  • No change the surface roughness.


Cleaning Procedure


Cleaning Performance

  • Remove Polyimide & Contamination Effectively
  • No Damage on Substrate
  • Best Environment for Cleaning (Class 10,000 ~ 10)