Parts Cleaning Service
HJT’s Cleaning Technology can support to Semiconductor, Display, AMOLED and LED coating parts with good quality control, which are remove surface contamination and prevent substrate damage through the optimum process.
- Process : Dry Etch, CVD, PVD, DIFF, Photo……
- Equipment : AMAT, LAM, TEL, Hitach, AMEC……
- Material : (Al2O3, Y2O3, AlN) Ceramic, Silicon, Quartz, SiC, Coating Parts, Anodized Al, Metal (Al, Ti, Ni, …)……
- Special Parts : ESC, AlN Ceramic Heater, Shower Head (ceramic bonding on Al body)
Cleaning Products - Dry Etch
PVD | CVD | LAM | TEL | AMAT |
---|

Lid Plate | 
Shower Head | 
TCP Window | 
Depo. Shield | 
LID |

Water Box | 
Ceramic Heater | 
TCP Window | 
Exhaust Plate | 
Shower Head |

Manifold |
| 
GDP | 
CEL Plate | 
Upper Linear |

Dual Manifold |
| 
ESC | 
ESC | 
ESC |
Cleaning Effect
- Remove particle inner hole through effective cleaning.

- Remove polyimide on the surface.
- No change the coating thickness.
- No change the surface roughness.

Cleaning Procedure

Cleaning Performance
- Remove Polyimide & Contamination Effectively
- No Damage on Substrate
- Best Environment for Cleaning (Class 10,000 ~ 10)