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Repair Service
ESC Refurbishment
LAM / AMAT / TEL / AMEC / ……
- Level #1 : Surface Refurbishment
- Level #2 : De-bonding / Re-bonding
- Level #3 : Replace New Ceramic Plate
Remove Plate
New Plate
Machining
Masking
Patterning
AMAT Dry Etch Shower Head Refurbishment
AMAT : Producer Etch/Enabler/e-Max
- Repair : Replace New Ceramic Plate
- New : New Shower Head
Shower Head
Remove Plate
New Ceramic
Water Flow Test
Bonding Inspection
LAM Dry Etch TCP Window Refurbishment
LAM : Metal M / CX/ EX /NXP
- SHD / IP Coating on used AD TCP Window
| Item | AD (OEM) | SHD (HJT) | IP (HJT) |
|---|
| System Image | 
| 
| 
|
| Step Coverage | Poor | Good | Good |
| Coating on Ceramic | Good | Good | Good |
| Coating on Anodizing Al | X | O | X |
| Coating Material | Y2O3 | Y2O3 | Y2O3 & YOF |
