R&D


Cleaning Development

● Support the best Cleaning Condition of the Customer Process run better

    ‧ Fewer Defect
    ‧ Shorter Delivery Time

● New Cleaning Development to Support the New Material


Surface Morphology (3D Laser Microscope)

Chemical Durability

‧ Thickness Lose (Sub. Material)
‧ Hole Size Deviation (AOI)

Contamination Removal Ratio

(X-Ray, EDX, ICP-MS)


APS Coating Development

● Support the best APS Coating Material  of the Customer Process run better.

    ‧ Long PM Cycle and Life Time
    ‧ Lower Particle Generation
    ‧ Low Cost


Growth Rate & THK
Roughness
Porosity
Hardness
Adhesion
Breakdown Voltage
Composition
Material Structure
Surface Image
Chemical Durability
Plasma Durability
Cleaning Performance


New Material & Product Development

● APS (Atmospheric Plasma Spraying)
  • YF₃
  • YOF
  • Y₂O₃
  • YAG
● SPS (Suspension Plasma Spraying)
  • YOF
  • Y₂O₃
  • YAG
● SHD (Superior High Density)
  • Y₂O₃
● Innovation and improvement solution patents