弘洁的大气电浆陶瓷熔射喷涂技术透过最佳化的技术,以低孔隙率、高硬度、良好附着力与耐腐蚀性,为半导体、显示器、AMOLED 和LED 提供高品质的涂层材料与技术。
Item | APS | |||||
---|---|---|---|---|---|---|
Y2O3 | YF3 | YOF | YAG | |||
Material Properties | Thickness (㎛) | Customer Nomination | ||||
Roughness (㎛) | ||||||
Porosity (%) | < 3.0% | < 3.0% | < 3.0% | < 3.0% | ||
Hardness (Hv) | > 450Hv | > 250Hv | > 400Hv | > 650Hv | ||
Adhesion (psi)@ Al | ≥ 6,000 | ≥ 7,000 | ≥ 6,000 | ≥ 7,000 | ||
BV (V/mil) | ≥ 550 | ≥ 500 | ≥ 600 | ≥ 600 | ||
Plasma Test | Etch rate | O2 Plasma | 0.13 | 0.12 | 0.12 | 0.09 |
F Plasma | 0.13 | 0.13 | 0.12 | 0.12 | ||
Surface | O2 Plasma | □ | □ | □ | ◎ | |
F Plasma | △ | □ | □ | ◎ | ||
Chemical test | Surface | △ | ◎ | ◎ | ◎ | |
Reaction | △ | ◎ | ◎ | ◎ |