
弘潔的大氣電漿陶瓷熔射噴塗技術透過最佳化的技術,以低孔隙率、高硬度、良好附著力與耐腐蝕性,為半導體、顯示器、AMOLED 和 LED 提供高品質的塗層材料與技術。
| Item | APS | |||||
|---|---|---|---|---|---|---|
| Y2O3 | YF3 | YOF | YAG | |||
| Material Properties | Thickness (㎛) | Customer Nomination | ||||
| Roughness (㎛) | ||||||
| Porosity (%) | < 3.0% | < 3.0% | < 3.0% | < 3.0% | ||
| Hardness (Hv) | > 450Hv | > 250Hv | > 400Hv | > 650Hv | ||
| Adhesion (psi)@ Al | ≥ 6,000 | ≥ 7,000 | ≥ 6,000 | ≥ 7,000 | ||
| BV (V/mil) | ≥ 550 | ≥ 500 | ≥ 600 | ≥ 600 | ||
| Plasma Test | Etch rate | O2 Plasma | 0.13 | 0.12 | 0.12 | 0.09 |
| F Plasma | 0.13 | 0.13 | 0.12 | 0.12 | ||
| Surface | O2 Plasma | □ | □ | □ | ◎ | |
| F Plasma | △ | □ | □ | ◎ | ||
| Chemical test | Surface | △ | ◎ | ◎ | ◎ | |
| Reaction | △ | ◎ | ◎ | ◎ | ||












